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Equipment components for semiconductor manufacturing: high barriers to core components, domestic substitution of the underlying link
Semiconductor equipment components are upstream of semiconductor equipment and are the suppliers of core components. Complex structure, large volume, high integration.
Release time:
2024-08-04
Semiconductor equipment components are upstream of semiconductor equipment and are the suppliers of core components. Semiconductor equipment has complex structure, large volume, high integration, and is composed of a wide variety of parts. Moreover, as the semiconductor manufacturing process becomes more advanced and precise, more and more stringent specification requirements are put forward for semiconductor equipment and its core parts. Therefore, semiconductor parts have higher standards in materials, structure, process, quality, accuracy, reliability, stability and other aspects, which are not traditional mechanical components.
There are many standards for the classification of semiconductor components. According to their structural composition, they can be roughly divided into: mechanical, electrical, electromechanical, gas/liquid/vacuum systems, instruments and meters, optical, etc. If they are distinguished according to the internal process of the equipment cavity and the realized functions, the components can be divided into power supply and radio frequency control, gas transmission, vacuum control, temperature control, transmission device, etc; according to the material system of semiconductor parts, it can be divided into metal parts, quartz parts, silicon/silicon carbide parts, ceramic parts, graphite parts, plastic parts, etc. According to the service objects of semiconductor parts, it can also be divided into precision machine parts and general purchased parts. Precision machining parts are usually designed by engineers of various semiconductor equipment companies, and then outsourced processing, such as process chambers, transmission chambers, etc., which is relatively easy; while general-purpose purchased parts are some general-purpose parts that have been verified for a long time and have been widely recognized by many equipment factories and manufacturers. They are more standardized and will be used by different equipment companies, they are also used as spare parts and consumables on the production line (e. g. silicon structural parts, seals, valves, gauges, pumps, gas showers, etc.), which are relatively high because of their versatility and consistency and need to be certified on the equipment and manufacturing lines.
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