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Main classification of semiconductor components
This classification of semiconductor components can be divided into five categories: power and RF control, gas delivery, vacuum control, temperature control, conveyor class.
Release time:
2024-07-26
Semiconductor components are the key components of semiconductor equipment, according to incomplete statistics, the current industry on the classification of semiconductor components has not yet formed a standard, there are mainly the following classification methods.
Classified by internal process of typical IC device cavity
This classification of semiconductor components can be divided into five categories: power and RF control, gas delivery, vacuum control, temperature control, conveyor class.
① Power supply and RF control: including RF generator and matcher, DC/AC power supply, etc;
Gas transportation: including flow controller, pneumatic components, gas filter, etc;
③ Vacuum control category: including dry pump/cold pump/molecular pump and other vacuum pumps, control valves/pendulum valves and other types of valves, pressure gauges and O-Ring seals;
④ Temperature control: including heating plate/electrostatic chuck, heat exchanger and lifting components;
⑤ Transmission device: including mechanical arm, EFEM, bearing, precision track, stepping motor, etc.
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